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orgで入手可能になり，2003年7月発行に至る。初版は1996年12月発行。
SEMI E160-1211 (technical revision)
SEMI G87-1108 (Reapproved 0215)
This Test Method is therefore destructive to the silicon wafer
本スタンダードは数種類の
MS01200 - SEMI MS12 - Specification for Silicon Substrates Used in Fabrication of MEMS Devices StdPbc-0119 orgで入手可能になり，2003年7月発行に至る。初版は1996年12月発行。1 Purpose 1. 1 Although the substrates used in the production of MEMS share many physical and electrical properties with those used in IC manufacturing there are some significant differences as well. There exists a need to standardize MEMS substrates to allow the stocking of standard material, lowering the time to purchase, time to market and overall cost. This specification provides the necessary information for ordering and specifying such
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