C07700 - SEMI C77 - Test Method for Determining the Counting Efficiency of Liquid-Borne Particle Counters for Which the Minimum Detectable Particle Size is Between 30 nm and 100 nm Revision:SEMI C77-0818 - Current The purpose of this Document

The purpose of this Document is to standardize requirements for 1

Activation can take up to 3 business days

3  Fingerprint fouling is beyond the scope of this Standard

SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components

11 — Specific Device Model for Endpoint Devices

C07700 - SEMI C77 - Test Method for Determining the Counting Efficiency of Liquid-Borne Particle Counters for Which the Minimum Detectable Particle Size is Between 30 nm and 100 nm Revision:SEMI C77-0818 - Current The purpose of this DocumentThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 22, 2018. Available at www. semiviews. org and www. semi. org in August 2018; originally published September 2012; previously published June 2018. This Document is to provide a test sequence for determining the counting efficiency of liquid borne particle counters for