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SEMI C36-0200 (technical revision)
originally published in 1988
SEMI C44-0618 (technical revision)
a mixed sample is used for analysis
This standard falls under the general specification
C02000 - SEMI C20 - Specification and Guide for Ammonium Fluoride 40% StdTpc-Silicon SEMI C36-0200 (technical revision)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to standardize requirements for ammonium fluoride 40% used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give